VUV EUV X-Ray In-Vacuum Camera

VUV EUV X-Ray In-Vacuum Camera are UHV compatible and are designed for imaging and spectroscopy in the VUV, EUV, soft and hard X-ray range up to 20 keV.


Based on a unique platform concept, greateyes offers a portfolio of scientific VUV EUV X-Ray In-Vauum cameras for imaging and spectroscopy in the VUV, EUV, soft and hard X-ray range up to 20 keV. Fabrication of the cameras in stainless steel or aluminium provides excellent vacuum compatibility. A single additional flange integrates electrical and water cooling feedthroughs. The CCD sensor directly detects incoming photons. No external controller is required to operate the detectors.

All greateyes cameras combine scientific CCD sensors with ultra-low noise electronics for optimal detection of weak signals. Select among different spectral sensitivities and sensor technologies to find the best solution for your imaging or spectroscopic application. The full-frame in-vacuum CCD cameras are cooled by multi-stage Peltier elements. The cameras provide a rich set of functionalities including flexible binning operation, various trigger and synchronization modes, software switchable gain as well as temperature monitoring of the CCD sensor and the Peltier hot side.

Key Features:

  • Compact size
  • Optimised for UHV compatibility
  • Flexible binning modes
  • Quantum efficiency up to 98%
  • Full well capacity up to 700 keˉ
  • Software adjustable gain setting
  • Deep cooling down to -80°C
  • Temperature monitoring for bake-out
  • Max. 18 bit dynamic range
  • Single flange for feedthroughs
  • Greateyes Vision software included
  • SDK & LabVIEW and EPICS drivers
  • Ext. trigger, shutter, sync signals


The VUV EUV X-Ray In-Vacuum camera range includes different sensors depending on the target energy range and the sensitivity required. The table below shows which sensor type is available for each resolution:

ResolutionFront Illuminated CCDFront Illuminated - Deep Depletion CCDBack Illuminated CCDBack Illuminated - Deep Depletion CCDBack Illuminated - UV Enhanced CCD
1024 X 256GE-VAC 1024 256 FIGE-VAC 1024 256 FI DD-GE-VAC 1024 256 BI DDGE-VAC 1024 256 BI UV1
1024 X 1024GE-VAC 1024 1024 FI-GE-VAC 1024 1024 BIGE-VAC 1024 1024 BI DDGE-VAC 1024 1024 BI UV1
2048 X 512GE-VAC 2048 512 FI-GE-VAC 2048 512 BI-GE-VAC 2048 512 BI UV1

View/Download the datasheet here.

Large format (2048 X 2048 ) VUV EUV X-Ray In-Vacuum cameras are also available.

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