NanoFAKTUR 100µm C1a X-Stages

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NanoFAKTUR 100µm C1a X-Stages are available as a open-loop only model (C1O-L00100), and an open or closed-loop model (C1S-D00100). The C1O-L00100 and C1S-D00100 are compact piezoelectric one-dimensional X-stages of very small dimensions. They have a footprint of 40×40 mm, and high stiffness and low resonance.

Product CodeC1O-L00100C1S-D00100Unit
Position sensor-SGS
Range (-45..180V)120120µm
Range (closed loop)-100nm
Resolution, open loop 0.50.5nm
Resolution, closed loop-1nm
Linearity, closed loop-0.2%
Repeatability, closed loop-10nm
Lowest Resonance, unloaded370370Hz
Lowest Resonance, w/ load 30g310310Hz
EL. Capacitance2.2/ axis2.2/ axisµF
Body materialAluminium, stainless steelAluminium, stainless steel
Wire length1.51.5m
Operating temperature-20...+80-20...+80°C

NanoFAKTUR 100µm C1a X-Stages Options:

  • Vacuum Compatibility
  • Non-Magnetic Versions
  • Suitable driver, open loop, EBO-050100
  • Suitable controller, closed loop, EBD-060100

Download or view data sheet here. Download/View the drawing here.

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