Description
NanoFAKTUR 100 µm & 250 µm C2a XY-Stages are available as open-loop, and as closed or open-loop models. They are are compact piezoelectric nano-positioning stages which are as small as 40 x 40 x 30 mm^3. Both versions, the 100µm and the 250µm, are available with or without sensors. The sensors are strain-sensors, which grant high repeatability and linearity. The 100 µm version is built to be stiff, so that dynamic operation and quite heavy loads are possible. The 250 µm version offers unique long displacements at such small size.
XY-stages, 100 and 250 microns
| Product Code | C2O-L00100 | C2S-D00100 | C2O-L00250 | C2S-D00250 | Unit |
|---|---|---|---|---|---|
| Position sensors | Strain gauge (SGS) | Strain gauge (SGS) | |||
| Range (-45...180V) | 120x120 | 120x120 | 330x330 | 330x330 | µm |
| Range, closed loop | 100x100 | 250x250 | µm | ||
| Resolution, open loop | 0.5 | 0.5 | 1 | 1 | nm |
| Resolution, closed loop | 1 | 3 | nm | ||
| Linearity, closed loop | 0.2 | 0.2 | % | ||
| Repeatability, closed loop | 10 | 25 | nm | ||
| Push/Pull | 15/10 | 15/10 | 15/10 | 15/10 | N |
| Load, max | 500 | 500 | 150 | 150 | g |
| Stiffness | 0.2 | N/μm | |||
| Lowest resonance, unloaded | 370 | 370 | 210 | 210 | Hz |
| Lowest resonance, with 30 g load | 310 | 310 | 190 | 190 | Hz |
| EL. Capacitance @ 1V eff, 1kHz | 2.2/axis | 2.2/axis | 2.2/axis | 2.2/axis | µF |
| Body material | Aluminium, Stainless steel | Aluminium, Stainless steel | Aluminium, Stainless steel | Aluminium, Stainless steel | |
| Operating temperature | -20...+80 | -20...+80 | -20...+80 | -20...+80 | °C |
NanoFAKTUR 100 µm & 250 µm C2a XY-Stages Options:
- Vacuum Compatibility and/or Non-Magnetic
- Suitable driver, open loop, EBO-050100
- Suitable controller, closed loop, EBD-060100
