Piezo-Stages 1D-2D-3D

For a short form catalogue summarising the nanoFaktur range of products, click here


Photon Lines offers a wide range of nanometric precision stages from our partners nanoFaktur GmbH. For information on the entire product range, download their catalogue here

This comprehensive document also includes a full explanation of the principles behind piezoelectric actuators, and full specifications for their positioning systems, actuators, electronics and control software. Products offered include:

2D Piezo stages

C2a XY-Stages, 600 µm

C3a CUBE XYZ-Stages, 250 µm


L2S XY-Stage, 1mm, Aperture

T2a Tip/Tilt, Beam-Steering

Jacques and Pierre Curie discovered the piezo-electric effect in 1880. Certain solid-state materials generate electric charge when set under pressure (sensor-effect). The brothers described the inverse effect, which is the actuator-effect, one year later. Both piezo-effects have rapidly conquered applications and markets since 1954, when the ideal material PZT (lead-zirconate-titanate) was found. The sensor-effect of PZT is being used for e.g. maritime sonars, force-sensors and ultrasonic parking-sensors. nanoFaktur ́s expertise focuses on piezo- materials and sensors, which they employ in developing their high quality actuation and positioning systems.
Here are some of the manifold of applications and markets for PZT-actuators and -positionings:


Applications and markets for their PZT-actuators and -positioning systems include, but are not limited to the following:

  • Beam-Steering
  • SEM
  • Nano Indentation
  • Dispensing
  • Inspection Systems
  • Surface Inspection
  • Lithography
  • Semiconductor industry
  • Disc Drive Testing
  • Optical Trapping
  • White Light Interferometers
  • Autofocus
  • Nano Alignment
  • Sample Scanning
  • Z-Stacking
  • Dithering
  • Pixel Interpolation
  • AFM
  • Wafer Stages

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