300/600µm L2a XY-Stages with Aperture

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NanoFAKTUR’s 300/600µm L2a XY-Stages with Aperture are suitable for imaging applications including microscopy. The positioning-ranges are 300 μm or 600 μm. These stages are only 30 mm high. High precision frictionless flexure guiding leaves close to zero cross-talk and results in excellent flatness of motion. The large aperture of 66×66 mm allows for access to the samples from top and bottom. L2a stages are also available with integrated Z-axes (see L3a).

Product CodeL2S-D10300L2S-D10600Unit
Position sensorsStrain gauge (SGS) Full BridgeStrain gauge (SGS) Full Bridge
Range, closed loop300600µm
Range, open loop (-45... 180V)420720nm
Resolution, closed loop36nm
Linearity, closed loop0.20.2%
Repeatability. closed loop3060nm
Resonance, XY, unloaded210175Hz
Dimensions (LxWxH)150x15030mm
EL. Capacitance @ 1V eff, 1kHz13.213.2µF
Body/platform materialAluminium, BlackAluminium, Black
Operating temperature-20...+80-20...+80°C
Cable Length1.51.5mm

Options for 300/600µm L2a XY-Stages with Aperture :

  • Vacuum Compatibility
  • Suitable driver, open loop, EBO-050100
  • Suitable controller, closed loop, EBD-060100

Download or view data sheet here. View or download the drawings here.

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