NanoFAKTUR 600µm C3a Cube XYZ Stages

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NanoFAKTUR 600µm C3a Cube XYZ Stages  are compact piezoelectric nanopositioning slides with small dimensions (60 x 60 x 52 mm^3). The stages are available with or without sensors. The sensors are strain-sensors, which grant high repeatability and linearity. Vacuum and non-magnetic versions are available.

C3a 600 are only 60 x 60 x 52 mm^3


NanoFAKTUR 600µm C3a Cube XYZ Stages Options:

  • Vacuum Compatibility and/or Non-Magnetic
  • Suitable driver, open loop, EBO-050100
  • Suitable controller, closed loop, EBD-120230
Product CodeC3O-L00600 C3S-D00600Unit
Position sensorsStrain gauge (SGS)
Range, open loop (-45...180V) 900 x 900 x 600 900 x 900 x 600µm
Range, closed loop600 x 600 x 500µm
Resolution, open loop44nm
Resolution, closed loop6nm
Linearity, closed loop0.2%
Repeatability, closed loop50nm
Load, max200200g
Lowest resonance, unloaded190/145/130 190/145/130 Hz
EL. Capacitance @ 1V eff, 1kHz4.4/axis 4.4/axis µF
Body materialAluminium, Stainless steelAluminium, Stainless steel
Operating temperature-20...+80-20...+80°C

Download or view data sheet here.

View the 100µm and 250µm versions of the stage here.

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