NanoFAKTUR 500µm CPa Z-Stages

The CPa 500 stage is designed for High Lift whilst maintaining small dimensions, the size is 60x60x29 mm3 only. The stages are available with or without sensor. The version with sensor allows for repeatable and driftless positioning. Target positions can be reached within 10 ms. The positioning linearity is better than 0.2%. Versions for UHV and high magnetic fields are available.

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NanoFAKTUR 500µm CPa Z-Stages are available as a open-loop only model (CPO-L00500), and an open or closed-loop model (CPS-D00500). CPO-L00500 and CPS-D00500 are compact Z-stages providing long ranges (high lift) but with very small dimensions. The footprint is only 60×60 mm and the range is 500 microns.


Product CodeCPO-L00500CPS-D00500Unit
Position sensor-SGS, Full Bridge
Range (closed loop)-500µm
Range, open loop (-45...180V)600600µm
Resolution, open loop33nm
Resolution, closed loop-5nm
Linearity, closed loop-0.2%
Push/Pull, maximum40/2040/20N
Lateral force1010N
Resonance, unloaded260260Hz
Resonance, with 100g load180180Hz
EL. Capacitance @ 1V eff, 1kHz4.44.4µF
Body materialAluminium, stainless steelAluminium, stainless steel
Operating temperature-20...+80-20...+80°C

NanoFAKTUR 500µm CPa Z-Stages Options:

  • Vacuum Compatibility
  • Suitable driver, open loop, EBO-050100
  • Suitable controller, closed loop, EBD-060100

Download or view data sheet. View or download the drawings here.

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