NanoFAKTUR 100µm CPa Z-Stages

Dynamic and Long-Range Lift
The CPa 100 stage offers long displacements whilst maintaining nanoFaktur’s compact (40 x 40 x 30 mm^3) high precision construction. Like the 250 micron version, the CPa 100 is ideal for dynamic applications.

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NanoFAKTUR 100µm CPa Z-Stages are available as a open-loop only model (CPO-L00100 ), and an open or closed-loop model (CPS-D00100). CPO-L00100 and CPS-D00100 are piezoelectric Z-stage with nanometre precision, very small dimensions and long ranges. The footprint is only 40×40 mm


Product CodeCPO-L00100CPS-D00100Unit
Position sensor-SGS, Full Bridge
Range (closed loop)-100µm
Range, open loop (0...150V)7575µm
Range, open loop (-45...180V)120120µm
Resolution, open loop0.50.5nm
Resolution, closed loop-1nm
Linearity, closed loop-0.2%
Resonance, unloaded370370Hz
Resonance, with 100g load310310Hz
EL. Capacitance @ 1V eff, 1kHz2.22.2µF
Body materialAluminium, stainless steelAluminium, stainless steel
Wire length1.51.5m
Operating temperature-20...+80-20...+80°C

NanoFAKTUR 100 µm CPa Z-Stages Options:

  • Vacuum Compatibility
  • Non-Magnetic Versions
  • Suitable driver, open loop, EBO-050100
  • Suitable controller, closed loop, EBD-060100

Download or view data sheet. View or download the drawings here.

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