Description
LPa X/Y linear stages are directly driven by piezo-stack actuators, with 45 and 90 micron displacements for 0 to 150 input voltages. Direct drives are used to keep the first resonances enormously high, making them perfect for dynamic applications. These dynamic actuators should be employed in line with their loads, in order to avoid torque and possible tilt-oscillation. LPa can be used two different orientations, as standard X or Z piston stages.
- Ranges 45/90 µm
- Fast
- 2 Platforms
| Product Code | LPa-b00045 | LPa-b00090 | Unit |
|---|---|---|---|
| Displacement (0... 150 V) | 45 | 90 | µm |
| Displacement (-45... 180 V) | 72 | 143 | µm |
| Resolution, open loop | 0.1 | 0.2 | nm |
| Resolution, closed loop | 1 | 2 | nm |
| Linearity, closed loop | 0.1 | 0.2 | % |
| Repeatability. closed loop | 5 | 6 | nm |
| Push/Pull, maximum | 200/25 | 200/25 | N |
| Stiffness | 21 | 10 | N/μm |
| Resonance, unloaded | 3,000 | 2,000 | Hz |
| EL. Capacitance @ 1V eff, 1kHz | 3.3 | 6.6 | µF |
| Body material | Stainless steel | Stainless steel | |
| Operating temperature | -20...+80 | -20...+80 | °C |
Options:
- Vacuum Compatibility
- Suitable driver, open loop, EBO-050100
- Suitable controller, closed loop, EBD-060100
