Description
NanoFAKTUR 600µm C3a Cube XYZ Stages are compact piezoelectric nanopositioning slides with small dimensions (60 x 60 x 52 mm^3). The stages are available with or without sensors. The sensors are strain-sensors, which grant high repeatability and linearity. Vacuum and non-magnetic versions are available.
C3a 600 are only 60 x 60 x 52 mm^3
NanoFAKTUR 600µm C3a Cube XYZ Stages Options:
- Vacuum Compatibility and/or Non-Magnetic
- Suitable driver, open loop, EBO-050100
- Suitable controller, closed loop, EBD-120230
| Product Code | C3O-L00600 | C3S-D00600 | Unit |
|---|---|---|---|
| Position sensors | Strain gauge (SGS) | ||
| Range, open loop (-45...180V) | 900 x 900 x 600 | 900 x 900 x 600 | µm |
| Range, closed loop | 600 x 600 x 500 | µm | |
| Resolution, open loop | 4 | 4 | nm |
| Resolution, closed loop | 6 | nm | |
| Linearity, closed loop | 0.2 | % | |
| Repeatability, closed loop | 50 | nm | |
| Push/Pull | 50/20 | 50/20 | N |
| Load, max | 200 | 200 | g |
| Stiffness | 0.15 | 0.15 | N/μm |
| Lowest resonance, unloaded | 190/145/130 | 190/145/130 | Hz |
| EL. Capacitance @ 1V eff, 1kHz | 4.4/axis | 4.4/axis | µF |
| Body material | Aluminium, Stainless steel | Aluminium, Stainless steel | |
| Operating temperature | -20...+80 | -20...+80 | °C |
