Description
NanoFAKTUR 250µm C1a X-Stages 250µm C1a X-Stages are available as a open-loop only model (C1O-L00250 ), and an open or closed-loop model (C1S-D00250). The C1O-L00250 and C1S-D00250 are compact piezoelectric X-stages with greater the 300 micron travel when used in the open-loop mode.
Product Code | C1O-L00250 | C1S-D00250 | Unit |
---|---|---|---|
Position sensor | - | SGS | |
Range (-45..180V) | 330 | 330 | µm |
Range (closed loop) | - | 250 | nm |
Resolution, open loop | 1 | 1 | nm |
Resolution, closed loop | - | 3 | nm |
Linearity, closed loop | - | 0.2 | % |
Repeatability, closed loop | - | 25 | nm |
Load | 150 | 150 | g |
Push/Pull | 15/10 | 15/10 | N |
Stiffness | 0.4 | 0.4 | N/μm |
Lowest Resonance, unloaded | 210 | 210 | Hz |
Lowest Resonance, w/ load 30g | 190 | 190 | Hz |
EL. Capacitance | 2.2/ axis | 2.2/ axis | µF |
Body material | Aluminium, stainless steel | Aluminium, stainless steel | |
Dimensions | 40x40x20 | 40x40x20 | mm |
Wire length | 1.5 | 1.5 | m |
Connector | Lemosa | DSub15 | |
Operating temperature | -20...+80 | -20...+80 | °C |
NanoFAKTUR 250µm C1a X-Stages Options:
- Vacuum Compatibility
- Non-Magnetic Versions
- Suitable driver, open loop, EBO-050100
- Suitable controller, closed loop, EBD-060100
Download or view data sheet. View or Download the drawings here.