NanoFAKTUR 1mm Aperture L2S XY-Stages

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NanoFAKTUR 1mm Aperture L2S XY-Stages has the longest ranges on the market – up to 1000µm. The stage’s aperture is 66 x 66 mm^2 and only 30 mm thick. The stages are available with strain gauges or capacitive sensors.

  • 1×1 mm
  • large aperture
  • high-dynamics

NanoFAKTUR 1mm Aperture L2S XY-Stages

Product CodeL2S-D01000Unit
Position sensorsStrain gauge (SGS) Full Bridge
Range, closed loop1000µm
Range, open loop (0... 150 V)1000µm
Range, open loop (-45... 180V)1600µm
Resolution, open loop5nm
Fesolution, closed loop10nm
Linearity, closed loop0.2%
Lateral Force10N
Resonance, unloaded105Hz
Resonance, with 200 g load80Hz
EL. Capacitance @ 1V eff, 1kHz19.8/axisµF
Body materialAluminium, Stainless steel
Operating temperature-20...+80°C

NanoFAKTUR 1mm Aperture L2S XY-Stage Options:

  • Vacuum Compatibility
  • Suitable driver, open loop, EBO-050100
  • Suitable controller, closed loop, EBD-060100


Download or view data sheet here. View or download the drawings here.

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