Description
NanoFAKTUR 600µm C1a X-Stages 250µm C1a X-Stages are available as a open-loop only model (C1O-L00600 ), and an open or closed-loop model (C1S-D00600). C1O-L00600 and C1S-D00600 are compact X-stages with smallest dimensions at ranges as long as 900 µm. The size is 60 x 60 x 21.5 mm only.
| Product Code | C1O-L00600 | C1S-D00600 | Unit |
|---|---|---|---|
| Position sensor | - | SGS | |
| Range (-45..180V) | 900 | 900 | µm |
| Range (closed loop) | - | 600 | nm |
| Resolution, open loop | 4 | 4 | nm |
| Resolution, closed loop | - | 6 | nm |
| Linearity, closed loop | - | 0.2 | % |
| Repeatability, closed loop | - | 50 | nm |
| Load | 200 | 200 | g |
| Push/Pull | 50/20 | 50/20 | N |
| Stiffness | 0.15 | 0.15 | N/μm |
| Lowest Resonance, unloaded | 190 | 190 | Hz |
| EL. Capacitance | 4.4/ axis | 4.4/ axis | µF |
| Body material | Aluminium, stainless steel | Aluminium, stainless steel | |
| Dimensions | 60x60x21.5 | 60x60x21.5 | mm |
| Wire length | 1.5 | 1.5 | m |
| Connector | Lemosa | DSub15 | |
| Operating temperature | -20...+80 | -20...+80 | °C |
NanoFAKTUR 600µm C1a X-Stages Options:
- Vacuum Compatibility
- Non-Magnetic Versions
- Suitable driver, open loop, EBO-050100
- Suitable controller, closed loop, EBD-060100
Download or view data sheet. View or download the drawings here.
