Description
NanoFAKTUR 600µm C2a XY-Stages are available as a open-loop only model (CPO-L00600 ), and an open or closed-loop model (CPS-D00600). The C2a 600 piezoelectric stages offer up to 900 µm range in XY at smallest dimensions. The size is 60 x 60 x 33 mm^3 only. The stages are available with or without sensor. The version with sensor allows for repeatable and drift-less positioning. Target positions can be reached in 10 ms magnitude. The linearity of positioning is better than 0.2%. Versions for UHV and high magnetic fields are available.
C2a 600 stages offer up to 900 µm range in XY at smallest dimensions, 60 x 60 x 33 mm^3
| Product Code | C2O-L00600 | C2S-D00600 | Unit |
|---|---|---|---|
| Position sensors | Strain gauge (SGS) | ||
| Range (-45...180V) | 900x900 | 900x900 | µm |
| Range, closed loop | 600x600 | µm | |
| Resolution, open loop | 4 | 4 | nm |
| Resolution, closed loop | 6 | nm | |
| Linearity, closed loop | 0.2 | % | |
| Repeatability, closed loop | 50 | nm | |
| Push/Pull | 50/20 | 50/20 | N |
| Stiffness | 0.15 | 0.15 | N/μm |
| Lowest resonance, unloaded | 190/145 | 190/145 | Hz |
| EL. Capacitance @ 1V eff, 1kHz | 4.4/axis | 4.4/axis | µF |
| Body material | Aluminium, Stainless steel | Aluminium, Stainless steel | |
| Operating temperature | -20...+80 | -20...+80 | °C |
NanoFAKTUR 600µm C2a XY-Stages Options:
- Vacuum Compatibility and/or Non-Magnetic
- Suitable driver, open loop, EBO-050100
- Suitable controller, closed loop, EBD-060100
