NanoFAKTUR 600µm C2a XY-Stages

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NanoFAKTUR 600µm C2a XY-Stages are available as a open-loop only model (CPO-L00600 ), and an open or closed-loop model (CPS-D00600). The C2a 600 piezoelectric stages offer up to 900 µm range in XY at smallest dimensions. The size is 60 x 60 x 33 mm^3 only. The stages are available with or without sensor. The version with sensor allows for repeatable and drift-less positioning. Target positions can be reached in 10 ms magnitude. The linearity of positioning is better than 0.2%. Versions for UHV and high magnetic fields are available.

C2a 600 stages offer up to 900 µm range in XY at smallest dimensions, 60 x 60 x 33 mm^3

Product CodeC2O-L00600 C2S-D00600Unit
Position sensorsStrain gauge (SGS)
Range (-45...180V)900x900900x900µm
Range, closed loop600x600µm
Resolution, open loop44nm
Resolution, closed loop6nm
Linearity, closed loop0.2%
Repeatability, closed loop50nm
Lowest resonance, unloaded190/145190/145Hz
EL. Capacitance @ 1V eff, 1kHz4.4/axis4.4/axisµF
Body materialAluminium, Stainless steelAluminium, Stainless steel
Operating temperature-20...+80-20...+80°C

NanoFAKTUR 600µm C2a XY-Stages  Options:

  • Vacuum Compatibility and/or Non-Magnetic
  • Suitable driver, open loop, EBO-050100
  • Suitable controller, closed loop, EBD-060100

Download or view data sheet

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