NanoFAKTUR 600µm C1a X-Stages

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NanoFAKTUR 600µm C1a X-Stages 250µm C1a X-Stages are available as a open-loop only model (C1O-L00600 ), and an open or closed-loop model (C1S-D00600). C1O-L00600 and C1S-D00600 are compact X-stages with smallest dimensions at ranges as long as 900 µm. The size is 60 x 60 x 21.5 mm only.


Product CodeC1O-L00600C1S-D00600Unit
Position sensor-SGS
Range (-45..180V)900900µm
Range (closed loop)-600nm
Resolution, open loop 44nm
Resolution, closed loop-6nm
Linearity, closed loop-0.2%
Repeatability, closed loop-50nm
Lowest Resonance, unloaded190190Hz
EL. Capacitance4.4/ axis4.4/ axisµF
Body materialAluminium, stainless steelAluminium, stainless steel
Wire length1.51.5m
Operating temperature-20...+80-20...+80°C

NanoFAKTUR 600µm C1a X-Stages Options:

  • Vacuum Compatibility
  • Non-Magnetic Versions
  • Suitable driver, open loop, EBO-050100
  • Suitable controller, closed loop, EBD-060100

Download or view data sheet. View or download the drawings here.

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