Description
NanoFAKTUR 100µm C1a X-Stages are available as a open-loop only model (C1O-L00100), and an open or closed-loop model (C1S-D00100). The C1O-L00100 and C1S-D00100 are compact piezoelectric one-dimensional X-stages of very small dimensions. They have a footprint of 40×40 mm, and high stiffness and low resonance.
Product Code | C1O-L00100 | C1S-D00100 | Unit |
---|---|---|---|
Position sensor | - | SGS | |
Range (-45..180V) | 120 | 120 | µm |
Range (closed loop) | - | 100 | nm |
Resolution, open loop | 0.5 | 0.5 | nm |
Resolution, closed loop | - | 1 | nm |
Linearity, closed loop | - | 0.2 | % |
Repeatability, closed loop | - | 10 | nm |
Load | 500 | 500 | g |
Push/Pull | 15/10 | 15/10 | N |
Stiffness | 1.5 | 1.5 | N/μm |
Lowest Resonance, unloaded | 370 | 370 | Hz |
Lowest Resonance, w/ load 30g | 310 | 310 | Hz |
EL. Capacitance | 2.2/ axis | 2.2/ axis | µF |
Body material | Aluminium, stainless steel | Aluminium, stainless steel | |
Dimensions | 40x40x20 | 40x40x20 | mm |
Wire length | 1.5 | 1.5 | m |
Connector | Lemosa | DSub15 | |
Operating temperature | -20...+80 | -20...+80 | °C |
NanoFAKTUR 100µm C1a X-Stages Options:
- Vacuum Compatibility
- Non-Magnetic Versions
- Suitable driver, open loop, EBO-050100
- Suitable controller, closed loop, EBD-060100
Download or view data sheet here. Download/View the drawing here.