Description
NanoFAKTUR 500µm CPa Z-Stages are available as a open-loop only model (CPO-L00500), and an open or closed-loop model (CPS-D00500). CPO-L00500 and CPS-D00500 are compact Z-stages providing long ranges (high lift) but with very small dimensions. The footprint is only 60×60 mm and the range is 500 microns.
| Product Code | CPO-L00500 | CPS-D00500 | Unit |
|---|---|---|---|
| Position sensor | - | SGS, Full Bridge | |
| Range (closed loop) | - | 500 | µm |
| Range, open loop (-45...180V) | 600 | 600 | µm |
| Resolution, open loop | 3 | 3 | nm |
| Resolution, closed loop | - | 5 | nm |
| Linearity, closed loop | - | 0.2 | % |
| Repeatability | - | 50 | nm |
| Push/Pull, maximum | 40/20 | 40/20 | N |
| Lateral force | 10 | 10 | N |
| Stiffness | 0.15 | 0.15 | N/μm |
| Resonance, unloaded | 260 | 260 | Hz |
| Resonance, with 100g load | 180 | 180 | Hz |
| EL. Capacitance @ 1V eff, 1kHz | 4.4 | 4.4 | µF |
| Body material | Aluminium, stainless steel | Aluminium, stainless steel | |
| Connector | Lemo | DSub15 | |
| Operating temperature | -20...+80 | -20...+80 | °C |
NanoFAKTUR 500µm CPa Z-Stages Options:
- Vacuum Compatibility
- Suitable driver, open loop, EBO-050100
- Suitable controller, closed loop, EBD-060100
Download or view data sheet. View or download the drawings here.
