Description
NanoFAKTUR 1mm Aperture L2S XY-Stages has the longest ranges on the market – up to 1000µm. The stage’s aperture is 66 x 66 mm^2 and only 30 mm thick. The stages are available with strain gauges or capacitive sensors.
- 1×1 mm
- large aperture
- high-dynamics
NanoFAKTUR 1mm Aperture L2S XY-Stages
| Product Code | L2S-D01000 | Unit |
|---|---|---|
| Position sensors | Strain gauge (SGS) Full Bridge | |
| Range, closed loop | 1000 | µm |
| Range, open loop (0... 150 V) | 1000 | µm |
| Range, open loop (-45... 180V) | 1600 | µm |
| Resolution, open loop | 5 | nm |
| Fesolution, closed loop | 10 | nm |
| Linearity, closed loop | 0.2 | % |
| Repeatability | 50 | nm |
| Push/Pull | 10 | N |
| Load | 0.2 | kg |
| Lateral Force | 10 | N |
| Stiffness | 0.2 | N/μm |
| Resonance, unloaded | 105 | Hz |
| Resonance, with 200 g load | 80 | Hz |
| EL. Capacitance @ 1V eff, 1kHz | 19.8/axis | µF |
| Body material | Aluminium, Stainless steel | |
| Operating temperature | -20...+80 | °C |
NanoFAKTUR 1mm Aperture L2S XY-Stage Options:
- Vacuum Compatibility
- Suitable driver, open loop, EBO-050100
- Suitable controller, closed loop, EBD-060100
Download or view data sheet here. View or download the drawings here.
