Description
NanoFAKTUR 100µm CPa Z-Stages are available as a open-loop only model (CPO-L00100 ), and an open or closed-loop model (CPS-D00100). CPO-L00100 and CPS-D00100 are piezoelectric Z-stage with nanometre precision, very small dimensions and long ranges. The footprint is only 40×40 mm
| Product Code | CPO-L00100 | CPS-D00100 | Unit |
|---|---|---|---|
| Position sensor | - | SGS, Full Bridge | |
| Range (closed loop) | - | 100 | µm |
| Range, open loop (0...150V) | 75 | 75 | µm |
| Range, open loop (-45...180V) | 120 | 120 | µm |
| Resolution, open loop | 0.5 | 0.5 | nm |
| Resolution, closed loop | - | 1 | nm |
| Linearity, closed loop | - | 0.2 | % |
| Repeatability | - | 10 | nm |
| Push/Pull | 15/10 | 15/10 | N |
| Stiffness | 1.5 | 1.5 | N/μm |
| Resonance, unloaded | 370 | 370 | Hz |
| Resonance, with 100g load | 310 | 310 | Hz |
| EL. Capacitance @ 1V eff, 1kHz | 2.2 | 2.2 | µF |
| Body material | Aluminium, stainless steel | Aluminium, stainless steel | |
| Dimensions | 60x60x21.5 | 60x60x21.5 | mm |
| Wire length | 1.5 | 1.5 | m |
| Connector | Lemo | DSub15 | |
| Operating temperature | -20...+80 | -20...+80 | °C |
NanoFAKTUR 100 µm CPa Z-Stages Options:
- Vacuum Compatibility
- Non-Magnetic Versions
- Suitable driver, open loop, EBO-050100
- Suitable controller, closed loop, EBD-060100
Download or view data sheet. View or download the drawings here.
