Description
NanoFAKTUR 100/250µm C3a Cube XYZ Stages are compact piezoelectric nanopositioning slides with small dimensions (40 x 40 x 44.6 mm^3). Both versions, the 100µm and the 250 µm, are available with or without sensors. The sensors are strain-sensors, which grant high repeatability and linearity. The 100 µm version of piezoelectric nanopositioning slides are built to be stiff, so that dynamic operation and quite heavy loads are possible. The 250 µm version offers unique long displacements at that small size. Vacuum and non-magnetic versions are available.
C3a 100 and 250 are only 40 x 40x 44 mm^3
| Product Code | C3O-L00100 | C3S-D00100 | C3O-L00250 | C3S-D00250 | Unit |
|---|---|---|---|---|---|
| Position sensors | Strain gauge (SGS) | Strain gauge (SGS) | |||
| Range, open loop (-45...180V) | 130 | 130 | 330 | 330 | µm |
| Range, closed loop | 100 | 250 | µm | ||
| Resolution, open loop | 0.5 | 0.5 | 1.5 | 1.5 | nm |
| Resolution, closed loop | 1 | 2.5 | nm | ||
| Linearity, closed loop | 0.2 | 0.2 | % | ||
| Repeatability, closed loop | 10 | 25 | nm | ||
| Push/Pull | 15/10 | 15/10 | 15/10 | 15/10 | N |
| Load, max | 500 | 500 | 150 | 150 | g |
| Stiffness | 1.5 | 1.5 | 0.4 | 0.4 | N/μm |
| Lowest resonance, unloaded | 370 | 370 | 210 | 210 | Hz |
| Lowest resonance, with 30 g load | 310 | 310 | 190 | 190 | Hz |
| EL. Capacitance @ 1V eff, 1kHz | 2.2/axis | 2.2/axis | 2.2/axis | 2.2/axis | µF |
| Body material | Aluminium, Stainless steel | Aluminium, Stainless steel | Aluminium, Stainless steel | Aluminium, Stainless steel | |
| Operating temperature | -20...+80 | -20...+80 | -20...+80 | -20...+80 | °C |
NanoFAKTUR 100/250µm C3a Cube XYZ Stage Options:
- Vacuum Compatibility and/or Non-Magnetic
- Suitable driver, open loop, EBO-050100
- Suitable controller, closed loop, EBD-060100
