Description
SPS flat Z-Stages for specimen are available with 3 different ranges: 120, 450 and 650 µm. The dimensions are the same for all ranges. The aperture is as large as 142 x 110 mm and can bear the optional sample and petri-dish holders.
SPS flat Z-Stages
| Product Code | SPS-D00120 | SPS-D00450 | SPS-D00650 | Unit |
|---|---|---|---|---|
| Displacement sensor | Strain gauges, full-bridge | Strain gauges, full-bridge | Strain gauges, full-bridge | |
| Displacement, closed loop | 120 | 450 | 650 | µm |
| Displacement (-30..160 V) | 170 | 580 | 820 | µm |
| Resolution, open loop | 0.4 | 1 | 2 | nm |
| Resolution, closed loop | 0.6 | 2 | 3 | nm |
| Linearity, closed loop | 0.1 | 0.1 | 0.1 | % |
| Repeatability, closed loop | 6 | 14 | 21 | nm |
| Push/Pull | 50/20 | 50/20 | 40/15 | N |
| Resonance, unloaded | 380 | 250 | 130 | Hz |
| Electrical Cap. @ 1V eff, 1kHz | 4.4 | 13.2 | 13.2 | µF |
| Electrical connection | D-Sub 15 | D-Sub 15 | D-Sub 15 | |
| Dimensions, LxWxH | 237x156x15 | 237x156x15 | 237x156x15 | mm |
| Aperture, L x W | 142 x 110 | 142 x 110 | 142 x 110 | mm |
| Body Material | aluminium, black anodised | aluminium, black anodised | aluminium, black anodised | |
| Operating Temperature | -20...80 | -20...80 | -20...80 | °C |
