Description
NanoFAKTUR’s 300/600µm L2a XY-Stages with Aperture are suitable for imaging applications including microscopy. The positioning-ranges are 300 μm or 600 μm. These stages are only 30 mm high. High precision frictionless flexure guiding leaves close to zero cross-talk and results in excellent flatness of motion. The large aperture of 66×66 mm allows for access to the samples from top and bottom. L2a stages are also available with integrated Z-axes (see L3a).
| Product Code | L2S-D10300 | L2S-D10600 | Unit |
|---|---|---|---|
| Position sensors | Strain gauge (SGS) Full Bridge | Strain gauge (SGS) Full Bridge | |
| Range, closed loop | 300 | 600 | µm |
| Range, open loop (-45... 180V) | 420 | 720 | nm |
| Resolution, closed loop | 3 | 6 | nm |
| Linearity, closed loop | 0.2 | 0.2 | % |
| Repeatability. closed loop | 30 | 60 | nm |
| Stiffness | 1 | 0.5 | N/μm |
| Resonance, XY, unloaded | 210 | 175 | Hz |
| Dimensions (LxWxH) | 150x150 | 30 | mm |
| EL. Capacitance @ 1V eff, 1kHz | 13.2 | 13.2 | µF |
| Body/platform material | Aluminium, Black | Aluminium, Black | |
| Operating temperature | -20...+80 | -20...+80 | °C |
| Connector | DSub25 | DSub25 | |
| Cable Length | 1.5 | 1.5 | mm |
Options for 300/600µm L2a XY-Stages with Aperture :
- Vacuum Compatibility
- Suitable driver, open loop, EBO-050100
- Suitable controller, closed loop, EBD-060100
Download or view data sheet here. View or download the drawings here.
