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Imagine Optic Wavefront Sensor HASO EUV

The HHG, Synchrotron, EUV-FEL and New Generation Lithography Solution.

Description

Specifications:

PropertyHASO EUVHASO EUV High NA
Aperture dimension 13 x 13 mm²D = 20 mm
Number of Sub-apertures72 x 72110 across diameter
Curvature dynamic range0.5 m to ∞ (diverging)0.1 m to ∞
Repeatability (rms) ~ λ/200~ λ/200
Wavefront measurement accuracy in absolute mode (rms)*λ/50 @ 13.5 nm~ λ/50 @ 30 nm
Wavefront measurement accuracy in relative mode (rms)**~ λ/100 @13.5 nm< λ/100 @ 30 nm
Tilt measurement sensitivity (rms)0.05 μrad0.1 μrad
Minimum readout timeabout 600 ms (@2 MHz digitization)~ 2s
Spatial beam sampling step~180 μm ~150 μm
Working photon energy (wavelength)***30 eV – 300 eV (4 nm – 40 nm) 27.6-124eV (10 nm – 45 nm)
Calibrated wavelengthuser specificuser specific
Length270 mm170 mm
Compliant vacuum (hydrocarbon free, compatible with clean vacuum) 10^-7 mbar down to 10^-6 mbar
(requires dynamic vacuum)
Interface / Power supply USB 2.0 / IncludedUSB 2.0 / Included
Sensor TypeVacuum InterfaceIn vacuum
Operating systemWindows 7Windows 7
External triggerPossiblePossible
WaveView metrology softwareIncludedIncluded

*Wavefront as seen by the device.

** Difference between the real wavefront and a reference wavefront obtained in similar conditions (5λ of shift max).

***Calibration ensured inside this range. Sensor may be used outside of this range.

View/download the datasheet for HASO EUV here.

View/download the datasheet for WaveView analysis software.

Application Examples:

  • HHG, synchrotron and EUV-FEL beam alignment and characterization
  • Micro and nano-beam focusing, automatic beam alignment, and achieving high Strehl ratio for adaptive optics applications
  • Mirror alignment in beamlines, Bender optimization to reach the best focal point size
  • stability characterization
  • Schwarzschild telescope alignment and characterization
  • Zoneplate characterization
  • Plasma science

Application Notes:

Articles:

Imagine Optic Webinar – Can you trust your wavefront sensor?

 

View/download notes on adaptive optics.

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